Nanotechnology Lithography Cleanroom

Design/Build Turnkey Nanotechnology Lithography Cleanroom

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Modular Cleanroom Implementation Details

Modular Cleanroom Information:

Client: Auburn University

Location: Auburn, Alabama

Industry: University/College Cleanrooms

Cleanroom Type: Nanotechnology Lithography Cleanroom

Size: 5 cleanrooms totaling 6000 sq. ft.

Designed By: Precision Cleanrooms

Installed By: Precision Cleanrooms

Cleanliness Class: Cleanroom Class 10 – Cleanroom Class 10000

Project Highlights:

  • Designed as a SCIF
  • Raised floor
  • Non-outgassing semiconductor wall system
  • Temperature humidity control
  • Cleanroom mechanical design and installation
  • Cleanroom electrical design and installation
  • Cleanroom control system design and installation
  • Cleanroom testing and certification
  • High purity process piping
  • N2 generator
  • DI water system
  • Air pollution control system
  • Supply and install process equipment
  • Hazardous gas detection system

 

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